The fused silica glass ring assists preserve a contamination-totally free atmosphere, significant for acquiring regular wafer top quality and high system yields.
Appropriate for use in fields of innovative engineering which include fuel mobile batteries as a result of its thermal resistance and insulation.
As opposed to standard quartz rings, OP Quartz Rings present higher opacity, greater thermal shielding, and lower mild transmission, serving to to take care of stable furnace problems and lower wafer contamination.
Customizable: We can produce quartz rings towards your specific requirements for inner diameter, outer diameter, and thickness/top.
Its specific dimensions ensure best suit and alignment in furnace assemblies, contributing to uniform fuel circulation and temperature Manage during procedures like CVD, diffusion, and annealing.
Serves as sealing rings and electrode fixing rings for UV lamps, mercury lamps, and xenon lamps, resisting substantial temperature and UV radiation.
This solution was formulated as a large temperature thermal insulation for instance in diffusion furnace and CVD equipment used in semiconductor manufacturing processes.
Acts for a protecting ingredient to stop different contaminations during the etching manufacturing course of action, ensuring sealing and security of the chamber. It really is utilized in wafer manufacturing etching processes, which might be small-temperature procedures.
・This ring is often generated to match The form on the quartz tube and silicon carbide tube loaded while in the furnace.
In plasma etching (Dry Etch) procedures, the quartz ring quartz insulation ring for semiconductor furnace acts as being a protecting barrier in opposition to plasma erosion and ion bombardment, shielding the chamber’s metallic surfaces from contamination and particle generation.
・We advocate reed-shaped filler with to stop particle generation in destinations that had been stuffed with silica wool.
The technological group of Highly developed Quartz Organization has been focused on the R&D and producing quartz merchandise for more than 30 yrs. At present, 40% on the products are exported to quartz insulation ring for semiconductor furnace Germany, The us, Singapore, Malaysia, the uk, France, Vietnam, Cambodia, India and Taiwan,China, and sixty% of the items are generally equipped to domestic customers in the sector of semiconductors and photovoltaic. We have now an entire selection of merchandise and robust structure abilities. We can customize In accordance with drawings or present Experienced surveying and drawing expert services without spending a dime. Our processing technologies and solution good quality have achieved a substantial stage from the marketplace.
Typical quartz rings, even though chemically pure and thermally stable, transmit more thermal radiation and so are far better suited for typical-function programs where by insulation is a lot less essential.
Picking concerning OP and common quartz rings depends upon system demands, furnace design, and the need for thermal uniformity and wafer security.